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產(chǎn)品名稱: Edwards iH600半導(dǎo)體真空泵
產(chǎn)品型號(hào): A59020957
產(chǎn)品展商: Edwards
產(chǎn)品文檔: 無(wú)相關(guān)文檔
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Edwards iH600半導(dǎo)體真空泵
的詳細(xì)介紹
Edwards iH600 Semiconductor Dry Vacuum Pump - NEW
Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.
The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.
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Peak speed
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600 m3h-1
353 cfm
10,000 lmin-1
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Ultimate vacuum
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7 x 10-4 mbar
5.3 x 10-4 Torr
0.07 Pa
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Typical shaft seal nitrogen flow
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4 slm
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Inlet connection
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ISO100
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Outlet connection
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NW40
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Typical cooling water flow at 15 psi pressure drop
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240 lh-1
4 lmin-1
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Weight
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415 kg
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Power input at ultimate
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3.4 kW
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Rated motor power
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6.1 kW
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Oil capacity
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1.43 l
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Edwards iH600 Semiconductor Dry Vacuum Pump - NEW
A59020908 / A590-20-908 iH600 MK5 460V 60Hz three-phase
A59020945 / A590-20-945 iH600 MK5 200/208V 50/60Hz 3-phase
A59020946 / A590-20-946 iH600 MK5 380/415V 50/60Hz 3-phase
A59020957 / A590-20-957 iH600 MK5 230V 60Hz 3-phase
