Edwards EPX500LE半導(dǎo)體干式真空泵
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產(chǎn)品名稱(chēng): Edwards EPX500LE半導(dǎo)體干式真空泵
產(chǎn)品型號(hào): A41953012
產(chǎn)品展商: Edwards
產(chǎn)品文檔: 無(wú)相關(guān)文檔
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Edwards EPX500LE半導(dǎo)體干式真空泵
的詳細(xì)介紹
Edwards EPX500LE 208V Semiconductor Dry Vacuum Pump - NEW
The new compact EPX500 high vacuum drypump offers enhanced performance with reduced cost of ownership. Using a unique patent protected mechanism the EPX500 is capable of pumping from atmosphere to ultimate pressures of < 7 x 10-7 Torr. Based on the successful award winning IPX range, the modular EPX500 offers outstanding performance in a package that is 20% lighter, 30% smaller and requires 40% less power than the IPX. The EPX LE series of pumps has an End User Controller (EUC). The End User Controller enables local control for stand-alone use as well as the ability to connect to a fab-wide network for remote control and monitoring.
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Peak Speed
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500 m3h-1 / 295 ft3min-1 / 8,338 lmin-1
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Ultimate Vacuum
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< 1 x 10-6 mbar / < 7 x 10-7 Torr / < 1 x 10-4 Pa
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Warm up time (to nominal performance)
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30 min
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Inlet Flange
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ISO160
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Outlet flange
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NW25
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Noise
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< 59 dB(A)
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Minimum cooling water flow rate
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2 lmin-1
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Cooling water temperature
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15 - 35°C
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Electrical supply
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200/208 V, 50/60 Hz 3-phase
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Power at ultimate
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1.4 kW
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Rated motor power
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3.0 kW
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TIM
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None
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Weight
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45.2 kg
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Edwards EPX500LE 208V Semiconductor Dry Vacuum Pump - NEW
A41953012 / A419-53-012 EPX500LE 208V No TIM 3/8 water connector
A41953014 / A419-53-014 EPX500LE 400V No TIM 3/8 water connectors
A41953312 / A419-53-312 EPX500LE 208V E73 TIM 3/8 water connector
A41953412 / A419-53-412 EPX500LE 208V TEL TIM 3/8 water connector
A41953712 / A419-53-712 EPX500LE 208V MCM TIM 3/8 water connector
OBSOLETED
A40902977 / A409-02-977 IPX100
A40902973 / A409-02-973 IPX100
A40904977 / A409-04-977 IPX100A
A40904973 / A409-04-973 IPX100A
A40924977 / A409-24-977 IPX180A
A40924973 / A409-24-973 IPX180A
A40914977 / A409-14-977 IPX500A
A40914973 / A409-14-973 IPX500A
