Edwards EPX180LE - NEW半導(dǎo)體干泵
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產(chǎn)品名稱: Edwards EPX180LE - NEW半導(dǎo)體干泵
產(chǎn)品型號(hào): A41943012
產(chǎn)品展商: Edwards
產(chǎn)品文檔: 無相關(guān)文檔
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Edwards EPX180LE - NEW半導(dǎo)體干泵
的詳細(xì)介紹
Edwards EPX180LE 208V Semiconductor Dry Vacuum Pump - NEW
The new compact EPX180 high vacuum dry pump offers enhanced performance with a reduced cost of ownership. Using a unique patent-protected mechanism the EPX180 is capable of pumping from the atmosphere to ultimate pressures of < 7.5 x 10-5 Torr. The EPX LE series of pumps has an End User Controller (EUC). The End User Controller enables local control for stand-alone use as well as the ability to connect to a fab-wide network for remote control and monitoring.
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Peak Speed
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170 m3h-1 / 105 ft3min-1 / 2,835 lmin-1
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Ultimate Vacuum
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< 1 x 104 mbar / < 7.5 x 10-5 / < 1 x 10-2 Pa Torr
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Warm up time (to nominal performance)
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30 min
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Inlet Flange
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ISO63
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Outlet flange
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NW25
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Noise
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< 59 dB(A)
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Water connectors
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3/8 in Quick
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Minimum cooling water flow rate
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2 lmin-1
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Cooling water temperature
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15 - 35°C
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Electrical supply
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200/208 V, 50/60 Hz 3-phase
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Power at ultimate
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1.4 kW
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Rated motor power
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3.0 kW
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TIM
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None
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Weight
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43.5 kg
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Edwards EPX180LE 208V Semiconductor Dry Vacuum Pump - NEW
A41943012 / A419-43-012 EPX180LE 208V No TIM 3/8 water connector
A41943014 / A419-43-014 EPX180LE 400V No TIM 3/8 water connectors
A41943022 / A419-43-022 EPX180LE 208V No TIM 1/4 water connector
A41943024 / A419-43-024 EPX180LE 400V No TIM 1/4 water connectors
A41943112 / A419-43-112 EPX180LE 208V C3 TIM 3/8 water connector
A41943212 / A419-43-212 EPX180LE 208V SPI TIM 3/8 water connector
A41943222 / A419-43-222 EPX180LE 208V SPI TIM 1/4 water connector
A41943224 / A419-43-224 EPX180LE 400V SPI TIM 1/4 water connectors
A41943412 / A419-43-412 EPX180LE 208V TEL TIM 3/8 water connector
A41943612 / A419-43-612 EPX180LE 208V Hitachi TIM 3/8 water connector
A41943712 / A419-43-712 EPX180LE 208V MCM TIM 3/8 water connector
A41943714 / A419-43-714 EPX180LE 400V MCM TIM 3/8 water connectors
A41943722 / A419-43-722 EPX180LE 208V MCM TIM 1/4 water connector
OBSOLETED
A40902977 / A409-02-977 IPX100
A40902973 / A409-02-973 IPX100
A40904977 / A409-04-977 IPX100A
A40904973 / A409-04-973 IPX100A
A40924977 / A409-24-977 IPX180A
A40924973 / A409-24-973 IPX180A
A40914977 / A409-14-977 IPX500A
A40914973 / A409-14-973 IPX500A
