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產(chǎn)品名稱(chēng): Edwards iH1800HTX干式爪型真空泵
產(chǎn)品型號(hào): A59062945
產(chǎn)品展商: Edwards
產(chǎn)品文檔: 無(wú)相關(guān)文檔
簡(jiǎn)單介紹
Edwards iH1800HTX干式爪型真空泵
的詳細(xì)介紹
Edwards iH1800HTX Semiconductor Dry Vacuum Pump - NEW
Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.
The iH1800HTX is specifically designed for processes such as 300 mm LPCVD Nitride, where higher operating temperatures are required to prevent process gas condensation.
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Peak Speed
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1800 m3h-1
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1060 cfm
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30000 l min-1
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Ultimate Vacuum
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1 x 10-3 mbar
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7.5 x 10-4 Torr
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0.1 Pa
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Typical shaft seal nitrogen flow
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4 slm
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Inlet Connection
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ISO160
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Outlet Connection
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NW40
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Typical cooling water flow at 15 psi pressure drop
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240 l h-1
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4 l min-1
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Weight
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502 kg
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Power input at ultimate
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4.1 kW
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Rated motor power
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7.0 kW
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Oil Capacity
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1.6 l
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All figures are typical without gas ballast.
Specifications
Edwards iH1800HTX Semiconductor Dry Vacuum Pump - NEW
A59040908 / A590-40-908 iH1800 460V 60Hz three-phase
A59040945 / A590-40-945 iH1800 200/208V 60Hz 3-phase
A59040946 / A590-40-946 iH1800 380/415V 50Hz 3-phase
A59040957 / A590-40-957 iH1800 230V 60Hz 3-phase
A59060945 / A590-60-945 iH1800 200/208V 50Hz 3-phase
A59042908 / A590-42-908 iH1800HTX 460V 60Hz 3-phase
A59042945 / A590-42-945 iH1800HTX 200/208V 50/60Hz 3-phase
A59042946 / A590-42-946 iH1800HTX 380/415V 50Hz 3-phase
A59042957 / A590-42-957 iH1800HTX 230V 60Hz 3-phase
A59062945 / A590-62-945 iH1800HTX 200/208V 50/60Hz 3-phase
