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產(chǎn)品名稱(chēng): Edwards SCU-350分子泵控制器
產(chǎn)品型號(hào): YT21Z0Z01
產(chǎn)品展商: Edwards
產(chǎn)品文檔: 無(wú)相關(guān)文檔
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Edwards SCU-350分子泵控制器
的詳細(xì)介紹
Edwards SCU-350 Turbomolecular Vacuum Pump Control Unit - NEW
The Edwards new SCU-350 control unit is a EU-RoHS compliant controller for small sized turbo pumps. It is fully compatible with the current control unit models, but has an improved vibration property at low frequency range. It also has lower input voltage, which contributes to a reduction in electric capacity and tool power consumption. The SCU-350 has improved noise immunity and is equipped with universal voltage function for operation with supply voltage from 100-240 VAC without switching.
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Better vibration property
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No peak vibration movement across all frequencies
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Compact design
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Smallest size control unit in its class
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Energy saving
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Low input power translates into low power consumption on the tool
Universal voltage for range 100-240VAC.
No switching required between 100-120V and 200-240V.
Minimizes number of back up units stocked
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Full compatibility with existing control unit
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Same size
Same cables can be used
No change to pumping performance
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Better noise immunity
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Electrostatic discharge withstand voltage up to 30kV with standard specification
Applicable for ion implant tools
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Compliant with international standards
CE Marked, UL marked, SEMI-S2 and EU-RoHS Compliant
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Magnetic bearing control system
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Digital control
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Input voltage
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100 - 120 V / 200 - 240 VAC
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Power consumption (start up)
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Max 350 VA
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Power consumption (continuous)
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Max 150 VA
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Input frequency
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50/60 ±2 Hz
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Leak current
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3.5 mA
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Main breaker rated current
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5 A
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Motor drive system
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3 phase DC
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Allowable ambient temperature
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0 to 40°C (32 to 104°F)
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Weight
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8 kg
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Panel display
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LCD
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Edwards SCU-350 Turbomolecular Vacuum Pump Control Unit - NEW
YT21Z0Z01 / YT21-Z0-Z01 SCU-350
YT21ZEZC0 / YT21-ZE-ZC0 SCU-350 RS232
YT21ZCZC0 / YT21-ZC-ZC0 SCU-350A ABS
