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Edwards STP-iXA2206C渦輪分子泵

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產(chǎn)品名稱: Edwards STP-iXA2206C渦輪分子泵
產(chǎn)品型號: YT810Z010
產(chǎn)品展商: Edwards
產(chǎn)品文檔: 無相關(guān)文檔

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Edwards STP-iXA2206C Turbomolecular Vacuum Pump - NEW

The STP-iXA2206 series magnetically levitated turbomolecular pump provides industry-leading performance and incorporates a small power supply into the onboard control unit – the latest technology of the well-established STP-iXA2205 series. The height of the pump is equal to the STP-A2203C and is also equal to the height of the STP-iXA2205 series without it’s power supply (iPS-1200). This fully integrated product offers easy installation and a small footprint as an all-in-one solution for all application tools.

  • Compact design including a fully integrated controller
  • Innovative, self-sensing magnetic bearing system
  • Digital 5-axis control
  • Vibration levels reduced by 50% compared to the existing turbo pumps
  • Can be configured to run corrosive processes
Inlet flange size ISO250F / VG250 / ICF305
Backing port size KF40
Pump speed N2 / Ar 2,200/1,900 l/s
Compression ratio N2 / H2 > 108 / 1 x 104
Ultimate pressure 10-7 Pa (10-9 Torr)
Allowable backing pressure 266  Pa (2 Torr)
Max gas flow N2 * (water cooled only) 3,000 sccm
  (5.07 Pam3s-1)
Max gas flow Ar * (water cooled only) 1,400 sccm
  (2.36 Pam3s-1)
Rated speed 27,000 rpm
Run-up time to 90% rated speed < 8 minutes
Mounting position Any orientation
Input voltage 200-240 V
Max input power (without TMS) 1,200 VA
Weight 62 kg
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YT8120030 P081 IXA2206CV PUMP ICF305 KF40 KF10 W/
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