Edwards STP1003/C高真空渦輪分子泵
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產(chǎn)品名稱(chēng): Edwards STP1003/C高真空渦輪分子泵
產(chǎn)品型號(hào): YT390Z001
產(chǎn)品展商: Edwards
產(chǎn)品文檔: 無(wú)相關(guān)文檔
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Edwards STP1003/C高真空渦輪分子泵
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Edwards STP1003 / C Turbomolecular Vacuum Pump - NEW
Edwards corrosion resistant STP1003C is a new turbomolecular pump for use in the most advanced of semiconductor applications. Edwards’s rotor technology gives class-leading performance for maximum process flexibility. This pump has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.
Advanced Rotor Technology
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Maximized process flexibility
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Oil free
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Low vibration
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High reliability
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Maintenance free
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Harsh process compatible (C version)
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Increased life
Advanced Controller Design
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Auto tuning
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Self diagnostic functions
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DC motor drive
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Battery-free operation
Compact Design
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Small footprint
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Half rack controller
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Inlet flange
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ISO-200F
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Outlet port
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KF-40
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Purge port
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KF-10
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Water cooling fitting
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PT1/4
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Pumping speed
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N2
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1,000 l/s
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H2
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800 l/s
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Compression ratio
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N2
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> 108
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H2
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105
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Ultimate pressure w/ bake out heating
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10-7 Pa (10-9 Torr)
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Max. continuous outlet pressure
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13 Pa (0.1 Torr)
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Max. nitrogen throughput
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2,500 sccm
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Rated speed
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35,000 rpm
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Starting time
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6 min
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Max inlet flange temperature
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120°C
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Input voltage
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100 to 120
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Power consumption
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0.8 kVA
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Weight
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31 kg
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Edwards STP1003 / C Turbomolecular Vacuum Pump - NEW
P/N YT39-0Z-001 / YT390Z001 STP1003 ISO-200F
P/N YT39-B0-010 / YT39B0010 STP1003 DN 200 CF
P/N YT39-B0-130 / YT39B0130 STP1003C ISO-200F
PT39-AZ-003 / PT39AZ003 STP1003C DN 200 CF
