Edwards STPA803C Turbomolecular Vacuum Pump - NEW Edwards STPA803C turbomolecular pump is designed for use in semiconductor applications. Edwards advanced rotor technology gives class-leading performance for maximum process flexibility. The STPA803C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries. Advanced Rotor Technology Maximized process flexibility Oil free Low vibration High reliability Maintenance free Harsh process compatible Increased life Advanced Controller Design Auto tuning Self diagnostic functions DC motor drive Battery-free operation Compact Design Small footprint Half rack controller Inlet flange ISO160F Outlet port KF40 Purge port KF10 Water cooling fitting PT1/4 Pumping Speed N2 800 l/s H2 520 l/s Compression ratio N2 >108 H2 103 Ultimate pressure with bake out heating 10-7 Pa (10-9 Torr) Max continuous outlet pressure 270 Pa (2 Torr) Max Nitrogen throughput 1500 sccm Rated speed 32500 rpm Starting time 7 min Max inlet flange temperature 120 °C Input voltage 200 to 240 (± 10) V a.c. Power consumption 0.85 kVA Pump weight 39 kg Controller weight 9 kg Edwards STPA803C Turbomolecular Vacuum Pump - NEW P/N YT36-B0-040 / YT36B0040 STPA803C ISO-160F P/N YT36-B0-010 / YT36B0010 STPA803C DN 160 CF P/N YT36-26-000 / YT3626000 STPA803CV ISO-160F TMS YT36-26-003 / YT3626003 STPA803CV DN 160 CF TMS
Edwards STPA803C Turbomolecular Vacuum Pump - NEW
Edwards STPA803C turbomolecular pump is designed for use in semiconductor applications. Edwards advanced rotor technology gives class-leading performance for maximum process flexibility. The STPA803C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.
Advanced Rotor Technology
Advanced Controller Design
Compact Design
Edwards STPA803C Turbomolecular Vacuum Pump - NEW P/N YT36-B0-040 / YT36B0040 STPA803C ISO-160F P/N YT36-B0-010 / YT36B0010 STPA803C DN 160 CF P/N YT36-26-000 / YT3626000 STPA803CV ISO-160F TMS YT36-26-003 / YT3626003 STPA803CV DN 160 CF TMS
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